New Fume-removing System Invented for Semiconductor Factories

SEOUL, June 28 (Korea Bizwire) – A South Korean company said Tuesday it has developed a new fume removal system for semiconductor manufacturing chambers. The Fixed Chamber Exhaust System (FSC), created by Excelsior Co., has been already installed into more than 300 wafer-processing chambers of local factories, according to the firm. It stressed that the [...]