Mattson Technology Announces Innovative Products for Atomic Level Surface Engineering and Ultra-Selective Material Removal

FREMONT, Calif., Mar. 8 (Korea Bizwire) — Mattson Technology introduces Novyka™ product family, the most innovative technology for atomic level surface treatment and ultra-selective etching of extremely thin and delicate materials for continued scaling of 3D logic and memory devices. “There are significant challenges in scaling with 3D structures for advanced memory and logic chips [...]