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Lam Research Introduces Groundbreaking Suite of Selective Etch Tools to Accelerate Chipmakers’ 3D Roadmaps

Lam Research Introduces Groundbreaking Suite of Selective Etch Tools to Accelerate Chipmakers’ 3D Roadmaps

FREMONT, Calif., Feb. 9 (Korea Bizwire) — Lam Research Corp. (NASDAQ: LRCX) today announced a new suite of selective etch products that apply breakthrough wafer fabrication techniques and novel chemistries to support chipmakers in the development of gate-all-around (GAA) transistor structures. Composed of three new products – Argos®, Prevos™ and Selis® – Lam’s selective etch [...]

Lam Research Enables Next-Generation Memory with Industry’s First ALD Process for Low-Fluorine Tungsten Fill

Lam Research Enables Next-Generation Memory with Industry’s First ALD Process for Low-Fluorine Tungsten Fill

FREMONT, CA, Aug. 9 (Korea Bizwire) – Lam Research Corp. (NASDAQ: LRCX), an advanced manufacturer of semiconductor equipment, today introduced an atomic layer deposition (ALD) process for depositing low-fluorine-content tungsten films, the latest addition to its industry-leading ALTUS® family of products. With the industry’s first low-fluorine tungsten (LFW) ALD process, the ALTUS Max E Series [...]

Lam Research Launches Flex™ G Series for High-Aspect-Ratio Dielectric Etch

Lam Research Launches Flex™ G Series for High-Aspect-Ratio Dielectric Etch

FREMONT, CA, Jul. 13 (Korea Bizwire) – Lam Research Corp. (NASDAQ: LRCX), a major global supplier of innovative wafer fabrication equipment and services to the semiconductor industry, today announced it has introduced the Flex™ G Series for high-aspect-ratio (HAR) dielectric etch to enable the continued scaling of DRAM and 3D NAND devices. The HAR capacitor [...]

Lam Research Releases High-Productivity VECTOR® ALD Oxide Deposition System

Lam Research Releases High-Productivity VECTOR® ALD Oxide Deposition System

FREMONT, CA, Jul. 13 (Korea Bizwire) – Lam Research Corp. (NASDAQ: LRCX), a major global supplier of innovative wafer fabrication equipment and services to the semiconductor industry, today announced it has released its high-productivity VECTOR® ALD Oxide system on the Extreme platform. The new product uses atomic layer deposition (ALD) to create highly conformal dielectric [...]

Lam Research Kiyo® F Series Enables Critical Conductor Etch for Advanced Memory

Lam Research Kiyo® F Series Enables Critical Conductor Etch for Advanced Memory

FREMONT, CA,  May 18 (Korea Bizwire) – Lam Research Corp. (NASDAQ: LRCX), a major global supplier of innovative wafer fabrication equipment and services to the semiconductor industry, today announced its Kiyo® F Series conductor etch system is enabling the transition of 3D NAND and advanced DRAM into volume production. Key etch requirements for these applications [...]