Using a portable exhaust system placed above a chamber, a worker needs to wait for fumes to be discharged from inside it for some time and open a lid, wearing gas masks and other protection devices. (The image is not directly related to the article. image credit: Korea Bizwire)
SEOUL, June 28 (Korea Bizwire) – A South Korean company said Tuesday it has developed a new fume removal system for semiconductor manufacturing chambers.
The Fixed Chamber Exhaust System (FSC), created by Excelsior Co., has been already installed into more than 300 wafer-processing chambers of local factories, according to the firm.
It stressed that the new system gets rid of fumes, which many cause damage not only to chambers but also to workers, relatively safely and almost completely.
It also helps save a lot of time for related works, compared with existing portable apparatuses.
Semiconductor producers carry out “preventive maintenance” against fumes on a regular basis.
Using a portable exhaust system placed above a chamber, a worker needs to wait for fumes to be discharged from inside it for some time and open a lid, wearing gas masks and other protection devices.
It may cause the worker to be exposed to fumes, which can be toxic.
With the FSC, however, fumes are automatically suctioned through an air pump installed below each chamber.
“It reduces a loss in productivity by regular fume removal,” an Excelsior official said. “It also uses less electricity than a portable system, cutting operating time.”
The firm, based in Yongin, Gyeonggi Province, has a global patent for the system.
(Yonhap)
