Researchers at the Korea Research Institute of Standards and Science analyze the purity of homemade hydrogen fluoride on Sept. 22, 2020, in this photo provided by the institute.
DAEJEON, Sept. 23 (Korea Bizwire) – A state-funded research institute announced on Tuesday that it will launch a purity analysis service for locally-made hydrogen fluoride.
After furnishing quality evaluation equipment for high-purity gas materials used in semiconductors, the Korea Research Institute of Standards and Science (KRISS) is now ready to launch about 20 different types of quality evaluation services, starting with hydrogen fluoride.
To cope with Japan’s restrictions on exports of high-tech semiconductor materials, KRISS has spent a total of 1.5 billion won (US$1.28 million) from August last year to complete the construction of an exclusive lab to test the reliability of high-purity gas for use in semiconductors.
Hydrogen fluoride is used mainly for the cleaning and etching processes of semiconductor wafers.
High-purity hydrogen fluoride is needed to increase the production yield of semiconductors.
At present, a string of Japanese companies including Showa Denko and Morita Chemical Industries Co. are dominating the global market.
KRISS analyzes the impurity of the gas by gasifying the hydrogen fluoride that is in a liquid state in a cylinder.
Thereafter, scientists are able to determine the degree of final purity by analyzing the metallic impurities with an inductively coupled plasma spectrometer.
Thus far, it has been difficult to standardize the evaluation of high-purity hydrogen fluoride since local makers used different evaluation methods.
KRISS expects its service to clear the way for local hydrogen fluoride makers to address their shortcomings on the basis of the results of the new purity assessment.
Kevin Lee (kevinlee@koreabizwire.com)
